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1 Ergebnisse
1
Investigation of Removing Standing Wave Effect During Litho..:
, In:
2022 China Semiconductor Technology International Conference (CSTIC)
,
Liu, Xueqiang
;
Liu, Biqiu
;
Guo, Xiaobo
. - p. 1-3 , 2022
Link:
https://doi.org/10.1109/CSTIC55103.2022.9856886
RT T1 <cTitle>2022 China Semiconductor Technology International Conference (CSTIC)</cTitle>: T1 <Title>Investigation of Removing Standing Wave Effect During Litho Process</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9856886&Exemplar=1&LAN=DE A1 Liu, Xueqiang A1 Liu, Biqiu A1 Guo, Xiaobo A1 Yu, Shirui YR 2022 K1 Reflectivity K1 Optimization SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC55103.2022.9856886 DO https://doi.org/10.1109/CSTIC55103.2022.9856886 SF ELIB - SuUB Bremen
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