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1 Ergebnisse
1
PSR Silicon Trench Profile Optimization in FinFET Fabricati..:
, In:
2022 China Semiconductor Technology International Conference (CSTIC)
,
Li, Zhengning
;
Ke, Xing
;
Jiang, Changcheng
... - p. 1-3 , 2022
Link:
https://doi.org/10.1109/CSTIC55103.2022.9856894
RT T1 <cTitle>2022 China Semiconductor Technology International Conference (CSTIC)</cTitle>: T1 <Title>PSR Silicon Trench Profile Optimization in FinFET Fabrication</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9856894&Exemplar=1&LAN=DE A1 Li, Zhengning A1 Ke, Xing A1 Jiang, Changcheng A1 Li, Fengmei A1 Lin, Yangkui A1 Zhang, Haiyang YR 2022 K1 Fabrication K1 Performance evaluation K1 Transmission electron microscopy K1 Microscopy K1 FinFETs K1 Silicon K1 Oxidation SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC55103.2022.9856894 DO https://doi.org/10.1109/CSTIC55103.2022.9856894 SF ELIB - SuUB Bremen
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