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1 Ergebnisse
1
Hybrid Solutions for Root Cause Tracing of Random Alarm on ..:
, In:
2022 China Semiconductor Technology International Conference (CSTIC)
,
Diao, Xuling
;
Jiang, Yiyi
;
Wen, Shiyuan
... - p. 1-3 , 2022
Link:
https://doi.org/10.1109/CSTIC55103.2022.9856897
RT T1
2022 China Semiconductor Technology International Conference (CSTIC)
: T1
Hybrid Solutions for Root Cause Tracing of Random Alarm on Etch Tool
UL https://suche.suub.uni-bremen.de/peid=ieee-9856897&Exemplar=1&LAN=DE A1 Diao, Xuling A1 Jiang, Yiyi A1 Wen, Shiyuan A1 Shi, Xuelong A1 Jing, Quan A1 Li, Chen A1 Zhou, Tao YR 2022 K1 Training K1 Semiconductor device modeling K1 Radio frequency K1 Performance evaluation K1 Geometry K1 Analytical models K1 Production K1 root cause tracing K1 chamber matching (CM) K1 machine learning K1 principal component analysis (PCA) K1 random forest (RF) SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC55103.2022.9856897 DO https://doi.org/10.1109/CSTIC55103.2022.9856897 SF ELIB - SuUB Bremen
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