I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Influence of Ion Implantation on Silicon Pits Defect Format..:
, In:
2022 China Semiconductor Technology International Conference (CSTIC)
,
Xiao, Zhiqiang
;
Feng, Long
;
Xiao, Jiaxing
... - p. 1-3 , 2022
Link:
https://doi.org/10.1109/CSTIC55103.2022.9856905
RT T1 <cTitle>2022 China Semiconductor Technology International Conference (CSTIC)</cTitle>: T1 <Title>Influence of Ion Implantation on Silicon Pits Defect Formation in Oxide Etch Process</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9856905&Exemplar=1&LAN=DE A1 Xiao, Zhiqiang A1 Feng, Long A1 Xiao, Jiaxing A1 Yan, Haitao A1 Sui, Zhenchao A1 Zhang, Xin YR 2022 K1 Semiconductor device modeling K1 Scanning electron microscopy K1 Ion implantation K1 Image edge detection K1 Optical device fabrication K1 Layout K1 Implants SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC55103.2022.9856905 DO https://doi.org/10.1109/CSTIC55103.2022.9856905 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)
