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1 Ergebnisse
1
Low - Temperature Die to Glass Wafer Bonding Based on Au-Au..:
, In:
2022 China Semiconductor Technology International Conference (CSTIC)
,
Bao, Shuchao
;
Zhong, Yi
;
He, Yimin
.. - p. 1-3 , 2022
Link:
https://doi.org/10.1109/CSTIC55103.2022.9856914
RT T1
2022 China Semiconductor Technology International Conference (CSTIC)
: T1
Low - Temperature Die to Glass Wafer Bonding Based on Au-Au Atomic Diffusion
UL https://suche.suub.uni-bremen.de/peid=ieee-9856914&Exemplar=1&LAN=DE A1 Bao, Shuchao A1 Zhong, Yi A1 He, Yimin A1 Li, Ke A1 Yu, Daquan YR 2022 K1 Wafer bonding K1 Atomic measurements K1 Atomic layer deposition K1 Glass K1 Silicon K1 Surface roughness K1 Cleaning K1 heterogeneous integration K1 die to wafer K1 interposer K1 ADB K1 bonding SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC55103.2022.9856914 DO https://doi.org/10.1109/CSTIC55103.2022.9856914 SF ELIB - SuUB Bremen
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