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1 Ergebnisse
1
Control Performance Monitoring of RtR Controllers Based on ..:
, In:
2022 IEEE 11th Data Driven Control and Learning Systems Conference (DDCLS)
,
Ling, Dan
;
Li, Chaosong
;
Lei, Ting
.. - p. 904-910 , 2022
Link:
https://doi.org/10.1109/DDCLS55054.2022.9858568
RT T1 <cTitle>2022 IEEE 11th Data Driven Control and Learning Systems Conference (DDCLS)</cTitle>: T1 <Title>Control Performance Monitoring of RtR Controllers Based on Improved KL Divergence in Semiconductor Manufacturing Processes</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9858568&Exemplar=1&LAN=DE A1 Ling, Dan A1 Li, Chaosong A1 Lei, Ting A1 Wang, Yan A1 Guo, Danlei YR 2022 SN 2767-9861 K1 Degradation K1 Semiconductor device modeling K1 Technological innovation K1 System performance K1 Process control K1 Semiconductor device manufacture K1 Control systems K1 Control performance monitoring K1 EWMA RtR control K1 KL divergence K1 KDE SP 904 OP 910 LK http://dx.doi.org/https://doi.org/10.1109/DDCLS55054.2022.9858568 DO https://doi.org/10.1109/DDCLS55054.2022.9858568 SF ELIB - SuUB Bremen
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