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Silicon Micromachined Metrology Components for 0.5-1.1 THz:

, In: 2022 IEEE/MTT-S International Microwave Symposium - IMS 2022,
Campion, James ; Beuerle, Bernhard - p. 872-875 , 2022
Link: https://doi.org/10.1109/IMS37962.2022.9865544