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Fabrication of A Nickel MEMS Accelerometer Based On SU-8 LI..:

, In: 2022 IEEE International Conference on Electronics, Computing and Communication Technologies (CONECCT),
S, Kalaiselvi. ; L, Sujatha. ; R, Sundar. - p. 1-4 , 2022
Link: https://doi.org/10.1109/CONECCT55679.2022.9865704