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1 Ergebnisse
1
Long-term Reliability Evaluation of Internal Atmosphere on ..:
, In:
2022 23rd International Conference on Electronic Packaging Technology (ICEPT)
,
Huang, Xinlong
;
Dong, Xianshan
;
Zhou, Bin
... - p. 1-5 , 2022
Link:
https://doi.org/10.1109/ICEPT56209.2022.9872593
RT T1 <cTitle>2022 23rd International Conference on Electronic Packaging Technology (ICEPT)</cTitle>: T1 <Title>Long-term Reliability Evaluation of Internal Atmosphere on Sealed Packaged MEMS Devices</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9872593&Exemplar=1&LAN=DE A1 Huang, Xinlong A1 Dong, Xianshan A1 Zhou, Bin A1 Lai, Canxiong A1 Fu, Yanlong A1 Hu, Youwang YR 2022 K1 Micromechanical devices K1 Temperature measurement K1 Atmospheric measurements K1 Hydrogen K1 Atmosphere K1 Moisture K1 Thermal shock K1 MEMS device K1 Sealed packaging K1 Internal atmosphere K1 Long-term Reliability SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/ICEPT56209.2022.9872593 DO https://doi.org/10.1109/ICEPT56209.2022.9872593 SF ELIB - SuUB Bremen
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