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1 Ergebnisse
1
A Novel Piezoresitive Microphone MEMS Sensor For Aerospace ..:
, In:
2022 International Conference on Electrical, Computer and Energy Technologies (ICECET)
,
Ngo, Ha Duong
;
Erbacher, Kolja
;
Wu, Lixiang
... - p. 1-5 , 2022
Link:
https://doi.org/10.1109/ICECET55527.2022.9872990
RT T1 <cTitle>2022 International Conference on Electrical, Computer and Energy Technologies (ICECET)</cTitle>: T1 <Title>A Novel Piezoresitive Microphone MEMS Sensor For Aerospace Applications</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9872990&Exemplar=1&LAN=DE A1 Ngo, Ha Duong A1 Erbacher, Kolja A1 Wu, Lixiang A1 Wang, Bei A1 Pang, Zirui A1 Weiss, Julien A1 Acedo, Pablo YR 2022 K1 Wafer bonding K1 Contacts K1 Wind tunnels K1 Silicon K1 Microphone arrays K1 Pressure measurement K1 Noise measurement K1 AeroMEMS K1 microphone K1 pressure sensor K1 piezoresistive sensors SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/ICECET55527.2022.9872990 DO https://doi.org/10.1109/ICECET55527.2022.9872990 SF ELIB - SuUB Bremen
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