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1 Ergebnisse
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Analysis of the effects of thermo-mechanical stress on the ..:
, In:
2022 23rd International Conference on Electronic Packaging Technology (ICEPT)
,
Xiaorui, Bie
;
Xudong, Zou
;
Xingyin, Xiong
... - p. 1-7 , 2022
Link:
https://doi.org/10.1109/ICEPT56209.2022.9873218
RT T1
2022 23rd International Conference on Electronic Packaging Technology (ICEPT)
: T1
Analysis of the effects of thermo-mechanical stress on the frequency shift of MEMS resonators
UL https://suche.suub.uni-bremen.de/peid=ieee-9873218&Exemplar=1&LAN=DE A1 Xiaorui, Bie A1 Xudong, Zou A1 Xingyin, Xiong A1 Zheng, Wang A1 Wuhao, Yang A1 Zhitian, Li YR 2022 K1 Temperature measurement K1 Young's modulus K1 Thermomechanical processes K1 Resonant frequency K1 Silicon K1 Stability analysis K1 Finite element analysis K1 MEMS resonators K1 Frequency shift K1 Thermo-mechanical stress K1 FEM SP 1 OP 7 LK http://dx.doi.org/https://doi.org/10.1109/ICEPT56209.2022.9873218 DO https://doi.org/10.1109/ICEPT56209.2022.9873218 SF ELIB - SuUB Bremen
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