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Optimisation of PID control algorithms for lithography wafe..:

, In: 2022 23rd International Conference on Electronic Packaging Technology (ICEPT),
Jinfeng, Gong ; Huang, Chuyue ; Zhang, Huaiquan... - p. 1-5 , 2022
Link: https://doi.org/10.1109/ICEPT56209.2022.9873285