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Quantification of Doping Boron Ions in Si Embedded in Heavi..:

, In: 2022 23rd International Conference on Electronic Packaging Technology (ICEPT),
Xu, Huan ; Zhu, Lei ; Hua, Younan.. - p. 1-4 , 2022
Link: https://doi.org/10.1109/ICEPT56209.2022.9873342