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1 Ergebnisse
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Evaluation of BEOL scaling boosters for sub-2nm using enhan..:
, In:
2022 IEEE International Interconnect Technology Conference (IITC)
,
Farokhnejad, Anita
;
Esposto, Simone
;
Ciofi, Ivan
... - p. 136-138 , 2022
Link:
https://doi.org/10.1109/IITC52079.2022.9881286
RT T1 <cTitle>2022 IEEE International Interconnect Technology Conference (IITC)</cTitle>: T1 <Title>Evaluation of BEOL scaling boosters for sub-2nm using enhanced-RO analysis</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9881286&Exemplar=1&LAN=DE A1 Farokhnejad, Anita A1 Esposto, Simone A1 Ciofi, Ivan A1 Zografos, Odysseas A1 Weckx, Pieter A1 Ryckaert, Julien A1 Schuddinck, Pieter A1 Xiang, Yang A1 Tokei, Zsolt YR 2022 SN 2380-6338 K1 Ring oscillators K1 Resistance K1 Ruthenium K1 Metals K1 Capacitance K1 Optimization K1 Ruthenium semidamascene K1 interconnect scaling boosters K1 hybrid height K1 airgap K1 extended airgap K1 enhanced RO SP 136 OP 138 LK http://dx.doi.org/https://doi.org/10.1109/IITC52079.2022.9881286 DO https://doi.org/10.1109/IITC52079.2022.9881286 SF ELIB - SuUB Bremen
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