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Reliability Evaluation of Semi-damascene Ru/Air-Gap interco..:

, In: 2022 IEEE International Interconnect Technology Conference (IITC),
Lesniewska, A. ; Pedreira, O. Varela ; Roussel, Ph. J.... - p. 28-30 , 2022
Link: https://doi.org/10.1109/IITC52079.2022.9881299