I agree that this site is using cookies. You can find further informations here.
X
Merkliste 
 1 Ergebnisse 
 
1

Low Resistivity Tungsten and Ruthenium through Textural Con..:

, In: 2022 IEEE International Interconnect Technology Conference (IITC),
Mehta, Rutvik J. ; Cerio, Frank ; Wang, Yuejing Crystal... - p. 148-150 , 2022
Link: https://doi.org/10.1109/IITC52079.2022.9881301