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1 Ergebnisse
1
Galvanic Corrosion Effect of Co Liner on ALD TaN Barrier:
, In:
2022 IEEE International Interconnect Technology Conference (IITC)
,
Jang, Junki
;
Kim, Changhyun
;
Yoon, Youngsoo
... - p. 51-53 , 2022
Link:
https://doi.org/10.1109/IITC52079.2022.9881307
RT T1 <cTitle>2022 IEEE International Interconnect Technology Conference (IITC)</cTitle>: T1 <Title>Galvanic Corrosion Effect of Co Liner on ALD TaN Barrier</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9881307&Exemplar=1&LAN=DE A1 Jang, Junki A1 Kim, Changhyun A1 Yoon, Youngsoo A1 Choi, Yunki A1 Kim, Hoon A1 Park, Jungil A1 Park, Jaehyeong A1 Kang, Minguk A1 Kim, Youngwoo A1 Jang, Seonguk A1 Ahn, Junghwan A1 Park, Eunyoung A1 Jeong, Wonmin A1 Kim, Jeongjae A1 Oh, Minhyuk A1 Han, Wonkyu A1 Shin, Dongwoo A1 Kim, Wookhwan A1 Yang, Jaeyoung A1 Park, Honglae A1 Kwon, Segab A1 Ahn, Jeonghoon A1 Ku, Jahum YR 2022 SN 2380-6338 K1 Corrosion K1 Atomic layer deposition K1 Physical vapor deposition K1 Plasmas K1 Nitrogen K1 Cu K1 ALD TaN K1 PVD TaN SP 51 OP 53 LK http://dx.doi.org/https://doi.org/10.1109/IITC52079.2022.9881307 DO https://doi.org/10.1109/IITC52079.2022.9881307 SF ELIB - SuUB Bremen
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