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1 Ergebnisse
1
A Novel Air-gap Formation Method for Metal Interconnect:
, In:
2022 IEEE International Interconnect Technology Conference (IITC)
,
Choi, Youngjoon
;
Cho, Sungsik
- p. 93-95 , 2022
Link:
https://doi.org/10.1109/IITC52079.2022.9881315
RT T1 <cTitle>2022 IEEE International Interconnect Technology Conference (IITC)</cTitle>: T1 <Title>A Novel Air-gap Formation Method for Metal Interconnect</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9881315&Exemplar=1&LAN=DE A1 Choi, Youngjoon A1 Cho, Sungsik YR 2022 SN 2380-6338 K1 Air gaps K1 Metals K1 Polyimides SP 93 OP 95 LK http://dx.doi.org/https://doi.org/10.1109/IITC52079.2022.9881315 DO https://doi.org/10.1109/IITC52079.2022.9881315 SF ELIB - SuUB Bremen
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