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1 Ergebnisse
1
Reliability benchmark of various via prefill metals:
, In:
2022 IEEE International Interconnect Technology Conference (IITC)
,
Pedreira, O. Varela
;
Simons, V.
;
van der Veen, M.H
... - p. 31-33 , 2022
Link:
https://doi.org/10.1109/IITC52079.2022.9881318
RT T1
2022 IEEE International Interconnect Technology Conference (IITC)
: T1
Reliability benchmark of various via prefill metals
UL https://suche.suub.uni-bremen.de/peid=ieee-9881318&Exemplar=1&LAN=DE A1 Pedreira, O. Varela A1 Simons, V. A1 van der Veen, M.H A1 Ciofi, I. A1 Park, S. A1 Tokei, Zs. A1 Croes, K. A1 Pethe, S. A1 Lei, W. A1 Hwang, S. A1 Wu, Z. A1 Chen, F. A1 Jansen, A. A1 Machillot, J. A1 Cockburn, A. YR 2022 SN 2380-6338 K1 Electromigration K1 Tungsten K1 Failure analysis K1 Benchmark testing K1 Filling K1 Reliability K1 Thermal Storage K1 Barrierless selective deposition K1 tungsten via K1 hybrid systems SP 31 OP 33 LK http://dx.doi.org/https://doi.org/10.1109/IITC52079.2022.9881318 DO https://doi.org/10.1109/IITC52079.2022.9881318 SF ELIB - SuUB Bremen
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