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1 Ergebnisse
1
Carbon Plug Application in 3D NAND Fabrication:
, In:
2022 IEEE International Interconnect Technology Conference (IITC)
,
Chang, Yu-Chih
;
Chen, Liang-Yu
;
Chen, Kuang-Wei
... - p. 16-18 , 2022
Link:
https://doi.org/10.1109/IITC52079.2022.9881319
RT T1 <cTitle>2022 IEEE International Interconnect Technology Conference (IITC)</cTitle>: T1 <Title>Carbon Plug Application in 3D NAND Fabrication</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9881319&Exemplar=1&LAN=DE A1 Chang, Yu-Chih A1 Chen, Liang-Yu A1 Chen, Kuang-Wei A1 Luoh, Tuung A1 Yang, Ling-Wuu A1 Yang, Ta-Hone A1 Chen, Kuang-Chao YR 2022 SN 2380-6338 K1 Fabrication K1 Drilling K1 Three-dimensional displays K1 Carbon K1 Tuning K1 Plugs K1 3D NAND K1 Chemical-mechanical polishing K1 Step Coverage K1 Defect SP 16 OP 18 LK http://dx.doi.org/https://doi.org/10.1109/IITC52079.2022.9881319 DO https://doi.org/10.1109/IITC52079.2022.9881319 SF ELIB - SuUB Bremen
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