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Enabling 3-level High Aspect Ratio Supervias for 3nm nodes ..:

, In: 2022 IEEE International Interconnect Technology Conference (IITC),
Montero, D. ; Vega-Gonzalez, V. ; Feurprier, Y.... - p. 48-50 , 2022
Link: https://doi.org/10.1109/IITC52079.2022.9881321