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1 Ergebnisse
1
Investigation of BEoL integrated ferroelectric thin-film Hf..:
, In:
2022 IEEE International Symposium on Radio-Frequency Integration Technology (RFIT)
,
Abdulazhanov, Sukhrob
;
Huynh, Dang Khoa
;
Le, Quang Huy
... - p. 131-133 , 2022
Link:
https://doi.org/10.1109/RFIT54256.2022.9882465
RT T1
2022 IEEE International Symposium on Radio-Frequency Integration Technology (RFIT)
: T1
Investigation of BEoL integrated ferroelectric thin-film HfO2 for mmWave varactor applications
UL https://suche.suub.uni-bremen.de/peid=ieee-9882465&Exemplar=1&LAN=DE A1 Abdulazhanov, Sukhrob A1 Huynh, Dang Khoa A1 Le, Quang Huy A1 Lehninger, David A1 Kampfe, Thomas A1 Gedach, Gerald YR 2022 K1 Varactors K1 Radio frequency K1 Zirconium K1 Permittivity measurement K1 Millimeter wave technology K1 Insertion loss K1 CMOS technology K1 ferroelectric K1 MFM varactor K1 HZO K1 CPW K1 insertion loss K1 Back-End-of-Line SP 131 OP 133 LK http://dx.doi.org/https://doi.org/10.1109/RFIT54256.2022.9882465 DO https://doi.org/10.1109/RFIT54256.2022.9882465 SF ELIB - SuUB Bremen
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