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Demonstration of non-invasive probing of CMOS devices with ..:
, In:
2022 99th ARFTG Microwave Measurement Conference (ARFTG)
,
Sakamaki, R.
;
Kishikawa, R.
;
Tojima, Y.
... - p. 1-4 , 2022
Link:
https://doi.org/10.1109/ARFTG54656.2022.9896502
RT T1
2022 99th ARFTG Microwave Measurement Conference (ARFTG)
: T1
Demonstration of non-invasive probing of CMOS devices with aluminum pads at frequencies up to 500 GHz
UL https://suche.suub.uni-bremen.de/peid=ieee-9896502&Exemplar=1&LAN=DE A1 Sakamaki, R. A1 Kishikawa, R. A1 Tojima, Y. A1 Kon, S. A1 Somada, I. A1 Matsui, S. A1 Taoka, G. A1 Yoshida, T. A1 Amakawa, S. A1 Fujishima, M. YR 2022 K1 Microwave measurement K1 Semiconductor device measurement K1 Aluminum K1 Transmission line measurements K1 CMOS technology K1 Frequency measurement K1 Scattering parameters K1 On-wafer measurement K1 CMOS K1 contact resistance K1 measurement technique K1 millimeter-wave K1 terahertz SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/ARFTG54656.2022.9896502 DO https://doi.org/10.1109/ARFTG54656.2022.9896502 SF ELIB - SuUB Bremen
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