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Test Structure of Bi-stable Spring towards TopoMEMS Ising M..:

, In: 2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS),
Mita, Yoshio ; Ezawa, Motohiko ; Tsuji, Keigo... - p. 1-4 , 2022
Link: https://doi.org/10.1109/ICMTS50340.2022.9898227