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Issues and advances in rapid Quasi-Static CV for high throu..:
, In:
2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS)
,
Herman, Michael H.
;
Jang, Daniel
;
Nagel, Mark
. - p. 1-6 , 2022
Link:
https://doi.org/10.1109/ICMTS50340.2022.9898273
RT T1
2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS)
: T1
Issues and advances in rapid Quasi-Static CV for high throughput semiconductor process monitoring
UL https://suche.suub.uni-bremen.de/peid=ieee-9898273&Exemplar=1&LAN=DE A1 Herman, Michael H. A1 Jang, Daniel A1 Nagel, Mark A1 Morris, Ben YR 2022 SN 2158-1029 K1 Process monitoring K1 Instruments K1 Capacitance-voltage characteristics K1 Voltage K1 Throughput K1 Capacitance K1 Semiconductor process modeling K1 capacitance K1 quasi-static K1 LCR K1 QSCV SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/ICMTS50340.2022.9898273 DO https://doi.org/10.1109/ICMTS50340.2022.9898273 SF ELIB - SuUB Bremen
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