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Impact of FEOL cross-heating on the thermal performance of ..:
, In:
2022 21st IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (iTherm)
,
Lofrano, Melina
;
Vermeersch, Bjorn
;
Oprins, Herman
.. - p. 1-9 , 2022
Link:
https://doi.org/10.1109/iTherm54085.2022.9899545
RT T1
2022 21st IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (iTherm)
: T1
Impact of FEOL cross-heating on the thermal performance of advanced BEOL
UL https://suche.suub.uni-bremen.de/peid=ieee-9899545&Exemplar=1&LAN=DE A1 Lofrano, Melina A1 Vermeersch, Bjorn A1 Oprins, Herman A1 Park, Seongho A1 Tokei, Zsolt YR 2022 SN 2694-2135 K1 Heating systems K1 Temperature distribution K1 Temperature dependence K1 Cooling K1 Thermal resistance K1 Electronic packaging thermal management K1 Thermal force K1 BEOL K1 FEOL K1 Thermal coupling K1 Joule heating K1 Finite element model K1 Ru lines SP 1 OP 9 LK http://dx.doi.org/https://doi.org/10.1109/iTherm54085.2022.9899545 DO https://doi.org/10.1109/iTherm54085.2022.9899545 SF ELIB - SuUB Bremen
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