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1 Ergebnisse
1
Oxygen and hydrogen sorption in thermally activated yttrium..:
, In:
2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
,
Kutyla, Charlotte
;
Lemettre, Sylvain
;
Bessouet, Clement
... - p. 1-4 , 2022
Link:
https://doi.org/10.1109/DTIP56576.2022.9911710
RT T1 <cTitle>2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)</cTitle>: T1 <Title>Oxygen and hydrogen sorption in thermally activated yttrium-based getter thin films for MEMS vacuum packaging</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9911710&Exemplar=1&LAN=DE A1 Kutyla, Charlotte A1 Lemettre, Sylvain A1 Bessouet, Clement A1 Bosseboeuf, Alain A1 Coste, Philippe A1 Sauvage, Thierry A1 Wendling, Olivier A1 Bellamy, Aurelien A1 Jagtap, Piyush A1 Escoubas, Stephanie A1 Guichet, Christophe A1 Thomas, Olivier A1 Moulin, Johan YR 2022 K1 Temperature distribution K1 Spectroscopy K1 Oxygen K1 Hydrogen K1 Packaging K1 Silicon K1 Oxidation K1 Yttrium alloys K1 oxidation K1 getter K1 thin films K1 low-temperature bonding SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/DTIP56576.2022.9911710 DO https://doi.org/10.1109/DTIP56576.2022.9911710 SF ELIB - SuUB Bremen
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