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An out-of-plane FR4-MEMS Scanning Grating for NIR Spectrome..:

, In: 2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP),
Farrugia, Russell ; Portelli, Barnaby ; Grech, Ivan... - p. 1-6 , 2022
Link: https://doi.org/10.1109/DTIP56576.2022.9911731