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1 Ergebnisse
1
Nanoprobing Technique using Additional Gate Biasing for Ina..:
, In:
2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
,
Goh, Wai Ming
;
Vu, Linh Viet
;
Zhu, David
... - p. 1-6 , 2022
Link:
https://doi.org/10.1109/IPFA55383.2022.9915738
RT T1
2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
: T1
Nanoprobing Technique using Additional Gate Biasing for Inaccessible Contact Structures
UL https://suche.suub.uni-bremen.de/peid=ieee-9915738&Exemplar=1&LAN=DE A1 Goh, Wai Ming A1 Vu, Linh Viet A1 Zhu, David A1 Chua, Tze Ping A1 Yau, Moi Kian A1 Chow, Chi Eng A1 Tan, Grace A1 Nguyen, Hieu YR 2022 SN 1946-1550 K1 Integrated circuits K1 Three-dimensional displays K1 Failure analysis K1 Random access memory K1 Logic gates K1 Nanostructures K1 Transistors K1 3D FinFET K1 Nanoprobe K1 inaccessible contacts K1 indirect probe SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/IPFA55383.2022.9915738 DO https://doi.org/10.1109/IPFA55383.2022.9915738 SF ELIB - SuUB Bremen
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