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1 Ergebnisse
1
Characterization analysis of aluminum pad discoloration and..:
, In:
2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
,
Su, Frank
;
Tu, Ray
;
Hsieh, W.F.
... - p. 1-5 , 2022
Link:
https://doi.org/10.1109/IPFA55383.2022.9915755
RT T1 <cTitle>2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)</cTitle>: T1 <Title>Characterization analysis of aluminum pad discoloration and ions contamination monitor of wafer storage environment</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9915755&Exemplar=1&LAN=DE A1 Su, Frank A1 Tu, Ray A1 Hsieh, W.F. A1 Lin, Henry A1 Chen, Vincent A1 Ou, Irene A1 Lou, Y.S. YR 2022 SN 1946-1550 K1 Integrated circuits K1 Surface contamination K1 Fluorine K1 Aluminum K1 Storage management K1 Material storage K1 Ions K1 Al pad discoloration K1 fluorine contamination K1 Front Opening Shipping Box K1 Ion chromatrography SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/IPFA55383.2022.9915755 DO https://doi.org/10.1109/IPFA55383.2022.9915755 SF ELIB - SuUB Bremen
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