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1 Ergebnisse
1
A Correlative Analysis Flow for Electrical and Structural C..:
, In:
2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
,
Magnarin, L.
;
Agati, M.
;
Belmonte, A.
... - p. 1-4 , 2022
Link:
https://doi.org/10.1109/IPFA55383.2022.9915759
RT T1
2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
: T1
A Correlative Analysis Flow for Electrical and Structural Characterization of IGZO Transistors
UL https://suche.suub.uni-bremen.de/peid=ieee-9915759&Exemplar=1&LAN=DE A1 Magnarin, L. A1 Agati, M. A1 Belmonte, A. A1 Subhechha, S. A1 Rassoul, N. A1 Drijbooms, C. A1 Dekkers, H. A1 Celano, U. YR 2022 SN 1946-1550 K1 Integrated circuits K1 Atomic force microscopy K1 Transmission electron microscopy K1 Force K1 Failure analysis K1 Measurement techniques K1 Metrology K1 correlative metrology K1 site-specific failure analysis K1 C-AFM K1 TEM K1 IGZO SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IPFA55383.2022.9915759 DO https://doi.org/10.1109/IPFA55383.2022.9915759 SF ELIB - SuUB Bremen
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