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1 Ergebnisse
1
Novel Submicron Spatial Resolution Infrared Microspectrosco..:
, In:
2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
,
Zulkifli, Syahirah
;
Zee, Bernice
;
Lo, Michael K. F.
- p. 1-5 , 2022
Link:
https://doi.org/10.1109/IPFA55383.2022.9915774
RT T1
2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
: T1
Novel Submicron Spatial Resolution Infrared Microspectroscopy for Failure Analysis of Semiconductor Components
UL https://suche.suub.uni-bremen.de/peid=ieee-9915774&Exemplar=1&LAN=DE A1 Zulkifli, Syahirah A1 Zee, Bernice A1 Lo, Michael K. F. YR 2022 SN 1946-1550 K1 Sensitivity K1 Raman scattering K1 Failure analysis K1 Scattering K1 Reflection K1 Optical sensors K1 Optical scattering K1 contaminant K1 Infrared K1 O-PTIR K1 particle K1 Raman K1 simultaneous SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/IPFA55383.2022.9915774 DO https://doi.org/10.1109/IPFA55383.2022.9915774 SF ELIB - SuUB Bremen
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