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Failure analysis on MIMCAP failures of 10nm devices using p..:

, In: 2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA),
Li khoo, Hsu ; Goh, Lay Lay ; G, Yi Jie N... - p. 1-4 , 2022
Link: https://doi.org/10.1109/IPFA55383.2022.9915778