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Studies of Passivation (Si3N4/SiO2) Qualification Method in..:

, In: 2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA),
Hua, Younan ; Liao, Jinzhi Lois ; Liu, Binhai.. - p. 1-4 , 2022
Link: https://doi.org/10.1109/IPFA55383.2022.9915786