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1 Ergebnisse
1
Nanostructure Characterization and Film Thickness Measureme..:
, In:
2022 IEEE 12th International Conference Nanomaterials: Applications & Properties (NAP)
,
Madsen, Jonas S.M.
;
Korhonen, Raimo
;
Peltonen, Petri
.. - p. 01-04 , 2022
Link:
https://doi.org/10.1109/NAP55339.2022.9934704
RT T1 <cTitle>2022 IEEE 12th International Conference Nanomaterials: Applications & Properties (NAP)</cTitle>: T1 <Title>Nanostructure Characterization and Film Thickness Measurements at the Fabrication Line</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9934704&Exemplar=1&LAN=DE A1 Madsen, Jonas S.M. A1 Korhonen, Raimo A1 Peltonen, Petri A1 Rodenko, Olga A1 Jensen, Soren A. YR 2022 K1 Radar measurements K1 Optical device fabrication K1 Quality control K1 Interference K1 Optical variables measurement K1 Time measurement K1 Optical scattering K1 Roll to Roll nanoembossing K1 Optical scatterometry K1 In-line quality control SP 01 OP 04 LK http://dx.doi.org/https://doi.org/10.1109/NAP55339.2022.9934704 DO https://doi.org/10.1109/NAP55339.2022.9934704 SF ELIB - SuUB Bremen
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