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1 Ergebnisse
1
Chemical Mechanical Polishing of Superconducting Metals for..:
, In:
2022 IEEE 9th Electronics System-Integration Technology Conference (ESTC)
,
Bani, Mohamed Rayane
;
Crochemore, Romain
;
Baudin, Floriane
... - p. 01-05 , 2022
Link:
https://doi.org/10.1109/ESTC55720.2022.9939538
RT T1 <cTitle>2022 IEEE 9th Electronics System-Integration Technology Conference (ESTC)</cTitle>: T1 <Title>Chemical Mechanical Polishing of Superconducting Metals for Quantum Device Interconnections</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9939538&Exemplar=1&LAN=DE A1 Bani, Mohamed Rayane A1 Crochemore, Romain A1 Baudin, Floriane A1 Beluffi, Cassandre A1 Euvrard-Colnat, Catherine A1 Dominguez, Sebastien A1 Rodriguez, Guillaume A1 Souil, Richard A1 Velard, Remi A1 Charbonnier, Jean A1 Deschaseaux, Edouard A1 Thomas, Candice YR 2022 K1 Fabrication K1 Silicon compounds K1 Superconducting materials K1 Damascene integration K1 Metals K1 Quantum mechanics K1 Surface roughness K1 chemical mechanical polishing K1 superconducting routing K1 niobium K1 damascene integration SP 01 OP 05 LK http://dx.doi.org/https://doi.org/10.1109/ESTC55720.2022.9939538 DO https://doi.org/10.1109/ESTC55720.2022.9939538 SF ELIB - SuUB Bremen
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