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1 Ergebnisse
1
Design of Precision Positioning Stage Driven by Voice Coil ..:
, In:
2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
,
Sang, Na
;
Zhang, Chi
;
Huang, Xiaolu
... - p. 166-171 , 2022
Link:
https://doi.org/10.1109/3M-NANO56083.2022.9941667
RT T1 <cTitle>2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)</cTitle>: T1 <Title>Design of Precision Positioning Stage Driven by Voice Coil Motor with Integrated Active Eddy Current Damper</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9941667&Exemplar=1&LAN=DE A1 Sang, Na A1 Zhang, Chi A1 Huang, Xiaolu A1 Yu, Hongtao A1 Wang, Weizhen A1 Yang, Guilin YR 2022 SN 2694-510X K1 Vibrations K1 Force K1 Position measurement K1 Permanent magnet motors K1 Shock absorbers K1 Permanent magnets K1 Nanoscale devices K1 precision positioning stage K1 voice coil motor (VCM) K1 flexure guide K1 eddy current damper (ECD) SP 166 OP 171 LK http://dx.doi.org/https://doi.org/10.1109/3M-NANO56083.2022.9941667 DO https://doi.org/10.1109/3M-NANO56083.2022.9941667 SF ELIB - SuUB Bremen
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