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BEoL integrated hafnium zirconium oxide varactors for tunab..:

, In: ESSDERC 2022 - IEEE 52nd European Solid-State Device Research Conference (ESSDERC),
Abdulazhanov, Sukhrob ; Huynh, Dang Khoa ; Le, Quang Huy... - p. 253-256 , 2022
Link: https://doi.org/10.1109/ESSDERC55479.2022.9947182