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Correlation of Wafer-scale Film Stress Effects on ScAlN pMU..:

, In: 2022 IEEE International Ultrasonics Symposium (IUS),
Choong, D. S.W. ; Goh, D. J. ; Liu, J.... - p. 1-4 , 2022
Link: https://doi.org/10.1109/IUS54386.2022.9957483