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1 Ergebnisse
1
Inspection of Multilayered Electronic Devices via Scanning ..:
, In:
2022 IEEE International Ultrasonics Symposium (IUS)
,
Wolf, Mario
;
Hoffrogge, Peter
;
Kuhnicke, Elfgard
.. - p. 1-4 , 2022
Link:
https://doi.org/10.1109/IUS54386.2022.9957928
RT T1
2022 IEEE International Ultrasonics Symposium (IUS)
: T1
Inspection of Multilayered Electronic Devices via Scanning Acoustic Microscopy Using Synthetic Aperture Focusing Technique
UL https://suche.suub.uni-bremen.de/peid=ieee-9957928&Exemplar=1&LAN=DE A1 Wolf, Mario A1 Hoffrogge, Peter A1 Kuhnicke, Elfgard A1 Czurratis, Peter A1 Kupsch, Christian YR 2022 SN 1948-5727 K1 Scanning electron microscopy K1 Ultrasonic variables measurement K1 Microscopy K1 Volume measurement K1 Focusing K1 Inspection K1 Apertures K1 Scanning acoustic microscopy K1 synthetic aperture focusing technique K1 virtual point sources SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IUS54386.2022.9957928 DO https://doi.org/10.1109/IUS54386.2022.9957928 SF ELIB - SuUB Bremen
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