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Impact of sputtering atmosphere on residual stress in RF ma..:

, In: 2022 IEEE 16th International Conference on Solid-State & Integrated Circuit Technology (ICSICT),
Zhang, Yikai ; Xu, Wenjun ; Ding, Guojian... - p. 1-3 , 2022
Link: https://doi.org/10.1109/ICSICT55466.2022.9963232