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Surface Condition Optimization for Low Temperature Oxide Bo..:

, In: 2022 IEEE 16th International Conference on Solid-State & Integrated Circuit Technology (ICSICT),
Hung, Tzu-Heng ; Chen, Kuan-Neng - p. 1-1 , 2022
Link: https://doi.org/10.1109/ICSICT55466.2022.9963416