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1 Ergebnisse
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Plasma-Activated Cu-Cu and Al-Al Direct Bonding for Electro..:
, In:
2022 17th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)
,
Hu, Liangxing
;
Goh, Simon Chun Kiat
;
Lim, Yu Dian
... - p. 1-4 , 2022
Link:
https://doi.org/10.1109/IMPACT56280.2022.9966710
RT T1
2022 17th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)
: T1
Plasma-Activated Cu-Cu and Al-Al Direct Bonding for Electronics Packaging
UL https://suche.suub.uni-bremen.de/peid=ieee-9966710&Exemplar=1&LAN=DE A1 Hu, Liangxing A1 Goh, Simon Chun Kiat A1 Lim, Yu Dian A1 Zhao, Peng A1 Lim, Michael Joo Zhong A1 Miao, Weiyang A1 Dinh, Van Quy A1 Tan, Chuan Seng YR 2022 SN 2150-5942 K1 Micromechanical devices K1 Annealing K1 Packaging K1 Plasmas K1 Bonding K1 Plasma temperature K1 Three-dimensional integrated circuits SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IMPACT56280.2022.9966710 DO https://doi.org/10.1109/IMPACT56280.2022.9966710 SF ELIB - SuUB Bremen
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