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1 Ergebnisse
1
Piezoelectric thin film pressure sensor made by atomic laye..:
, In:
2022 14th International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM)
,
Hudec, Boris
;
Vanko, Gabriel
;
Precner, Marian
... - p. 1-4 , 2022
Link:
https://doi.org/10.1109/ASDAM55965.2022.9966760
RT T1 <cTitle>2022 14th International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM)</cTitle>: T1 <Title>Piezoelectric thin film pressure sensor made by atomic layer deposition of 002-oriented ZnO on Si3N4 membrane</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9966760&Exemplar=1&LAN=DE A1 Hudec, Boris A1 Vanko, Gabriel A1 Precner, Marian A1 Dobrocka, Edmund A1 Seifertova, Alena A1 Fedor, Jan A1 Tobik, Jaroslav A1 Frohlich, Karol YR 2022 SN 2474-9737 K1 Pressure sensors K1 Micromechanical devices K1 Semiconductor device measurement K1 II-VI semiconductor materials K1 Atomic layer deposition K1 Semiconductor devices K1 Zinc oxide SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/ASDAM55965.2022.9966760 DO https://doi.org/10.1109/ASDAM55965.2022.9966760 SF ELIB - SuUB Bremen
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