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Development of MEMS Flow Path for Miniature Waste Heat Util..:

, In: IECON 2022 – 48th Annual Conference of the IEEE Industrial Electronics Society,
Kaneko, Minami ; Niki, Yuya ; Takeda, Kenji.. - p. 1-6 , 2022
Link: https://doi.org/10.1109/IECON49645.2022.9968752