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1 Ergebnisse
1
Novel Control Design for Piezoelectric Stage to Achieve Fas..:
, In:
2022 International Automatic Control Conference (CACS)
,
Wu, Jim-Wei
;
Weng, Jui-Tse
;
Hsu, Ting-Kuei
.. - p. 1-6 , 2022
Link:
https://doi.org/10.1109/CACS55319.2022.9969847
RT T1
2022 International Automatic Control Conference (CACS)
: T1
Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory
UL https://suche.suub.uni-bremen.de/peid=ieee-9969847&Exemplar=1&LAN=DE A1 Wu, Jim-Wei A1 Weng, Jui-Tse A1 Hsu, Ting-Kuei A1 Chao, Shao-An A1 Chen, Bo-Hao YR 2022 K1 Vibrations K1 Spirals K1 Simulation K1 Force K1 Nonlinear distortion K1 Resonant frequency K1 Trajectory K1 Piezoelectric stage K1 atomic force microscopy K1 model predictive control K1 long short-term memory K1 spiral trajectory SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/CACS55319.2022.9969847 DO https://doi.org/10.1109/CACS55319.2022.9969847 SF ELIB - SuUB Bremen
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