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1 Ergebnisse
1
A Generation solving Layout Decomposition Method for DSA-MP..:
, In:
2022 International Workshop on Advanced Patterning Solutions (IWAPS)
,
Zhang, Tao
;
Zhou, Hengyu
;
Li, Sikun
.. - p. 1-4 , 2022
Link:
https://doi.org/10.1109/IWAPS57146.2022.9972300
RT T1
2022 International Workshop on Advanced Patterning Solutions (IWAPS)
: T1
A Generation solving Layout Decomposition Method for DSA-MP Hybrid Lithography
UL https://suche.suub.uni-bremen.de/peid=ieee-9972300&Exemplar=1&LAN=DE A1 Zhang, Tao A1 Zhou, Hengyu A1 Li, Sikun A1 Xiong, Shisheng A1 Wang, Xiangzhao YR 2022 K1 Fabrication K1 Backtracking K1 Self-assembly K1 Conferences K1 Lithography K1 Layout K1 Clustering algorithms K1 Directed self-assembly (DSA) K1 lithography K1 mask assignment K1 multiple patterning SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IWAPS57146.2022.9972300 DO https://doi.org/10.1109/IWAPS57146.2022.9972300 SF ELIB - SuUB Bremen
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