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1 Ergebnisse
1
Study on defocus image-based template matching algorithm fo..:
, In:
2022 International Workshop on Advanced Patterning Solutions (IWAPS)
,
Han, Xiaoquan
;
Ji, Yiwen
;
Wu, Xiaobin
... - p. 1-4 , 2022
Link:
https://doi.org/10.1109/IWAPS57146.2022.9972310
RT T1
2022 International Workshop on Advanced Patterning Solutions (IWAPS)
: T1
Study on defocus image-based template matching algorithm for extreme ultraviolet mask phase defect detection
UL https://suche.suub.uni-bremen.de/peid=ieee-9972310&Exemplar=1&LAN=DE A1 Han, Xiaoquan A1 Ji, Yiwen A1 Wu, Xiaobin A1 Ma, He A1 Xie, Wanlu A1 Sha, Pengfei YR 2022 K1 Diffraction K1 Ultraviolet sources K1 Conferences K1 Imaging K1 Light fields K1 Pattern matching K1 Lenses K1 EUV K1 Phase Defect K1 Image Processing K1 Template matching Algorithm SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IWAPS57146.2022.9972310 DO https://doi.org/10.1109/IWAPS57146.2022.9972310 SF ELIB - SuUB Bremen
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