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The Study of Deposition Process of the TiN coating for Atom..:
, In:
2022 International Conference on Information, Control, and Communication Technologies (ICCT)
,
Krasnoborodko, Sergey Yu.
;
Vysokikh, Yury E.
;
Paramonov, Vladislav V.
... - p. 1-4 , 2022
Link:
https://doi.org/10.1109/ICCT56057.2022.9976789
RT T1 <cTitle>2022 International Conference on Information, Control, and Communication Technologies (ICCT)</cTitle>: T1 <Title>The Study of Deposition Process of the TiN coating for Atomic Force Microscopy Cantilevers</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9976789&Exemplar=1&LAN=DE A1 Krasnoborodko, Sergey Yu. A1 Vysokikh, Yury E. A1 Paramonov, Vladislav V. A1 Medvedev, Boris K. A1 Filippov, Nikolay A. A1 Andreev, Alexey V. YR 2022 K1 Fabrication K1 Atomic measurements K1 Atomic force microscopy K1 Force K1 Tin K1 Surfaces K1 Coatings K1 cantilevers K1 electrical force microscope K1 atomic force microscopy SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/ICCT56057.2022.9976789 DO https://doi.org/10.1109/ICCT56057.2022.9976789 SF ELIB - SuUB Bremen
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