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1 Ergebnisse
1
Mechanical structure optimization design of fiber Fabry-Per..:
, In:
2022 International Conference on Manufacturing, Industrial Automation and Electronics (ICMIAE)
,
Geng, Dahe
;
Yuan, Yibo
;
Sun, Liqiang
... - p. 115-119 , 2022
Link:
https://doi.org/10.1109/ICMIAE57032.2022.00029
RT T1 <cTitle>2022 International Conference on Manufacturing, Industrial Automation and Electronics (ICMIAE)</cTitle>: T1 <Title>Mechanical structure optimization design of fiber Fabry-Perot pressure sensor sensitive diaphragm</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9981011&Exemplar=1&LAN=DE A1 Geng, Dahe A1 Yuan, Yibo A1 Sun, Liqiang A1 Li, Wenhong A1 Mi, Deyuan A1 Yang, Yiguang A1 Li, Xujin A1 Zhang, Weihong A1 Gong, Feng YR 2022 K1 Pressure sensors K1 Analytical models K1 Sensitivity K1 Linearity K1 Bending K1 Silicon K1 Fabry-Perot K1 Finite-Element-Simulation K1 FP K1 Pressure Sensor K1 MEMS SP 115 OP 119 LK http://dx.doi.org/https://doi.org/10.1109/ICMIAE57032.2022.00029 DO https://doi.org/10.1109/ICMIAE57032.2022.00029 SF ELIB - SuUB Bremen
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